FEATURES EXTRACTION ON COMPLEX IMAGES (MA-P1)

Author(s) : Pierrick Bourgeat (Le2i Laboratory, France) Fabrice Meriaudeau (Le2i Laboratory, France) Patrick Gorria (Le2i Laboratory, France) Kenneth Tobin (Oak Ridge National Laboratory, USA) Frederick Truchetet (Le2i Laboratory, France)

Abstract : In the last decade, the accessibility of inexpensive and powerful computers has allowed true digital holography to be used for industrial inspection using microscopy. This technique allows capturing a complex image of a scene (i.e. containing magnitude and phase), and reconstructing the phase and magnitude information. Digital holograms give a new dimension to texture analysis since the topology information can be used as an additional way to extract features. This new technique can be used to extend previous work on image segmentation of patterned wafers for defect detection. This paper presents a comparison between the features obtained using Gabor filtering on complex images under illumination and focus variations.

Menu